Micro phenomena measurement to silicon resonant microsensor are resented in this paper.主要论述硅谐振微传感器中微现象测量....

微传感器，微型敏感元件...

microsensor的音标：microsensor的英式发音音标为：[maɪkrəʊ'zensər]microsensor的美式发音音标为：[maɪkroʊ'zensər]...